Common Issues in Commissioning New Lithography Equipment in the Lab

From 1980 till 2009, I dedicated my career to installing, qualifying, and maintaining lithography equipment in lab environments. The tools I worked with included various models from the S100s Nikon series, ASML 2500 through scanners, and customized scanners by SVG. In this article, I will discuss the most common issues that arise during the commissioning of new lithography equipment in lab settings.

The Lab Environment

The lab environment is the cornerstone of successful lithography equipment commissioning. The first issue I consistently encountered was the lab environment. Maintaining the ideal temperature and humidity levels is crucial, as even small fluctuations can lead to significant problems. The temperature in the lab must be set and maintained at an optimal level, as temperature inconsistencies can compromise the reliability and performance of the equipment. In some cases, equipment providers opt for the chamber route to minimize temperature variations, but this can also lead to quality of product issues. For instance, temperature variations might affect the equipment's alignment and accuracy, leading to subpar results.

Processing and Quality of Lab Personnel

Processing and the quality of lab personnel are also critical factors in the commissioning process. Proper processing techniques are essential for ensuring the equipment operates at its optimum level. However, if the lab personnel are not sufficiently trained or experienced, this can lead to a range of issues, from operational inefficiencies to equipment damage. It is imperative to have skilled and trained personnel in the lab to handle the equipment and perform necessary maintenance.

Stabilized Air Quality and Vibration Control

A stable lab environment not only requires optimal temperature and humidity control but also entails stabilized air quality and vibration control. Air quality affects the quality of the processing environment, and any contaminants in the air can lead to contamination of the wafers. Consequently, it is essential to have a clean and controlled air supply to ensure the best possible results. Additionally, vibration can cause substantial damage to sensitive lithography equipment, leading to issues such as misalignment and misalignment of the tools. Ensuring that the lab is vibration-controlled helps to maintain the equipment's proper alignment and operation.

Power Supply and Maintenance

The power supply and the stability and consistency of vaccuum and air supplies are often overlooked but are critical elements in the commissioning process. Unstable power can cause equipment to malfunction, while inconsistent vacuum and air supplies can lead to operational issues and potentially damage the equipment. A reliable and consistent power supply is vital to ensure that the equipment operates smoothly and consistently.

Conclusion

Commissioning new lithography equipment in the lab is a complex process that requires careful attention to various factors. While temperature, lab environment, and processing are critical, the impact of these elements cannot be overstated. The importance of a stable and controlled lab environment, along with the quality of lab personnel, cannot be emphasized enough. Addressing these issues will lead to better equipment reliability and ultimately superior product quality. My experience has shown that those who address these elements have the best reliability and the most successful results in their lithography processes.

Just an old stepper mechanic sharing my perspective, I hope this insight is valuable to those in the field.